IC-compatible two-level bulk micromachining process module for RF silicon technology
Journal Article
(2001)
Author(s)
PN Pham (TU Delft - Electronic Components, Technology and Materials)
Lina Sarro (TU Delft - Electronic Components, Technology and Materials)
TK Ng (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:12b6defa-8019-46ed-a98d-e2c8f0a7a7e1
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Publication Year
2001
Research Group
Electronic Components, Technology and Materials
Issue number
8
Volume number
48
Pages (from-to)
1756-1764
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