Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices
Conference Paper
(2009)
Author(s)
A.T. Tran (TU Delft - Electronic Components, Technology and Materials)
H. Schellevis (TU Delft - Electronic Components, Technology and Materials)
C. Shen (TU Delft - Electronic Components, Technology and Materials)
TMH Pham (TU Delft - Old - EWI Sect. ECTM)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:1392a4c9-b505-4744-89bc-19ba0357a03e
More Info
expand_more
expand_more
Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
121-124
ISBN (print)
978-90-73461-62-8
No files available
Metadata only record. There are no files for this record.