Virtual Thermo-Mechanical Prototyping of Microelectronics and Microsystems
Book Chapter
(2007)
Author(s)
A Wymyslowski (TU Delft - Dynamics of Micro and Nano Systems)
GQ Zhang (TU Delft - Computational Design and Mechanics)
WD van Driel (TU Delft - Dynamics of Micro and Nano Systems)
LJ Ernst (TU Delft - Computational Design and Mechanics)
Research Group
Dynamics of Micro and Nano Systems
To reference this document use:
https://resolver.tudelft.nl/uuid:148dab50-36c0-40ec-ba94-165822800760
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Publication Year
2007
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
205-266
Publisher
Springer
ISBN (print)
978-0-387-27974-9
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