Very large scale characterization of graphene mechanical devices using a colorimetry technique

Journal Article (2017)
Author(s)

Santiago Cartamil Bueno (TU Delft - QN/Steeneken Lab)

Alba Centeno (Graphenea SA)

Amaia Zurutuza (Graphenea SA)

Peter Steeneken (TU Delft - QN/Steeneken Lab, TU Delft - Dynamics of Micro and Nano Systems)

H.S.J. van der Zant (TU Delft - QN/van der Zant Lab)

S Houri (TU Delft - QN/van der Zant Lab)

Research Group
QN/Steeneken Lab
DOI related publication
https://doi.org/10.1039/c7nr01766a
More Info
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Publication Year
2017
Language
English
Research Group
QN/Steeneken Lab
Issue number
22
Volume number
9
Pages (from-to)
7559-7564

Abstract

We use a scalable optical technique to characterize more than 21000 circular nanomechanical devices made of suspended single- and double-layer graphene on cavities with different diameters (D) and depths (g). To maximize the contrast between suspended and broken membranes we used a model for selecting the optimal color filter. The method enables parallel and automatized image processing for yield statistics. We find the survival probability to be correlated with a structural mechanics scaling parameter given by D4/g3. Moreover, we extract a median adhesion energy of Γ = 0.9 J m-2 between the membrane and the native SiO2 at the bottom of the cavities.

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