Very large scale characterization of graphene mechanical devices using a colorimetry technique
Santiago Cartamil Bueno (TU Delft - QN/Steeneken Lab)
Alba Centeno (Graphenea SA)
Amaia Zurutuza (Graphenea SA)
Peter Steeneken (TU Delft - QN/Steeneken Lab, TU Delft - Dynamics of Micro and Nano Systems)
H.S.J. van der Zant (TU Delft - QN/van der Zant Lab)
S Houri (TU Delft - QN/van der Zant Lab)
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Abstract
We use a scalable optical technique to characterize more than 21000 circular nanomechanical devices made of suspended single- and double-layer graphene on cavities with different diameters (D) and depths (g). To maximize the contrast between suspended and broken membranes we used a model for selecting the optimal color filter. The method enables parallel and automatized image processing for yield statistics. We find the survival probability to be correlated with a structural mechanics scaling parameter given by D4/g3. Moreover, we extract a median adhesion energy of Γ = 0.9 J m-2 between the membrane and the native SiO2 at the bottom of the cavities.
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