Surface roughness of contact windows for shallow junction formation
Conference Paper
(2004)
Author(s)
V Gonda (TU Delft - Electronic Components, Technology and Materials)
A Bourtsev (TU Delft - Electronic Components, Technology and Materials)
T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)
Lis Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:17202b72-c5e6-4f94-818a-0a72bd7cff1c
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Publication Year
2004
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
639-642
ISBN (print)
90-73461-43-X
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