Shallow junction formation by laser annealing
Report
(2002)
Author(s)
J.W.T. Heemskerk (TU Delft - Electronic Components, Technology and Materials)
C Ortiz (TU Delft - Electronic Components, Technology and Materials)
JHCM Slabbekoorn (TU Delft - Electronic Components, Technology and Materials)
T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:185065b1-c7c9-4ad1-9653-e94d34f45b27
More Info
expand_more
expand_more
Publication Year
2002
Research Group
Electronic Components, Technology and Materials
Volume number
PACD Project A1
No files available
Metadata only record. There are no files for this record.