Shallow junction formation by laser annealing

Report (2002)

Authors

J.W.T. Heemskerk Electronic Components, Technology and Materials - EEMCS
C Ortiz Electronic Components, Technology and Materials - EEMCS
JHCM Slabbekoorn Electronic Components, Technology and Materials - EEMCS
T.L.M. Scholtes Electronic Components, Technology and Materials - EEMCS
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Elektrotechniek Techniek
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Published Date

2002

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials