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C Ortiz
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Authored
4 records found
PACD process development
Report -
W.H.A. Wien
,
S. Milosavljevic
,
L.K. Nanver
,
H. Schellevis
,
T.L.M. Scholtes
,
J.W.T. Heemskerk
,
C Ortiz
,
JHCM Slabbekoorn
,
A Poliakov
,
M. Bartek
,
JN Burghartz
CV-doping profiling of shallow junctions with an abrupt and highly doped arsenic buried epilayer
Conference paper -
C Ortiz
,
L.K. Nanver
,
WD van Noort
,
T.L.M. Scholtes
,
JW Slotboom
Shallow junction formation by laser annealing
Report -
J.W.T. Heemskerk
,
C Ortiz
,
JHCM Slabbekoorn
,
T.L.M. Scholtes
,
L.K. Nanver
CV doping profiling of boron out-diffusion using an abrupt and highly doped arsenic buried epilayer
Conference paper -
C Ortiz
,
L.K. Nanver
,
WD van Noort
,
T.L.M. Scholtes
,
JW Slotboom