iTIRM as a tool for qualifying polishing processes
Journal Article
(2002)
Author(s)
OW Faehnle (TU Delft - ImPhys/Optics)
T Wons (External organisation)
E Koch (External organisation)
S Debruyne (External organisation)
M Meeder (External organisation)
SM Booij (TU Delft - ImPhys/Optics)
Joseph Braat (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:1b266acd-1734-47de-bde9-3369ff2108c5
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Publication Year
2002
Research Group
ImPhys/Optics
Issue number
19
Volume number
41
Pages (from-to)
4036-4038
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