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EK
E Koch
Academic Work (2)
Book chapter (1)
Journal article (1)
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2 records found
1
In situ Messmethode zum Monitoren der Qualitat optischer Oberflachen wahrend des Polierens auf der Maschine und Ihre Anwendung zum Klassifizieren von Polierprozessen
Book chapter (2002) -
OW Faehnle (author)
,
T Wons (author)
,
E Koch (author)
,
S. Debruyne-Fisba (author)
,
SM Booij (author)
,
M Meeder (author)
,
H van Brug (author)
,
J.J.M. Braat (author)
iTIRM as a tool for qualifying polishing processes
Journal article (2002) -
OW Faehnle (author)
,
T Wons (author)
,
E Koch (author)
,
S Debruyne (author)
,
M Meeder (author)
,
SM Booij (author)
,
J.J.M. Braat (author)
