E Koch

Book chapter (1)

Journal article (1)

2 records found

iTIRM as a tool for qualifying polishing processes

Journal article (2002) - OW Faehnle (author) , T Wons (author) , E Koch (author) , S Debruyne (author) , M Meeder (author) , SM Booij (author) , J.J.M. Braat (author)

In situ Messmethode zum Monitoren der Qualitat optischer Oberflachen wahrend des Polierens auf der Maschine und Ihre Anwendung zum Klassifizieren von Polierprozessen

Book chapter (2002) - OW Faehnle (author) , T Wons (author) , E Koch (author) , S. Debruyne-Fisba (author) , SM Booij (author) , M Meeder (author) , H van Brug (author) , J.J.M. Braat (author)