In situ Messmethode zum Monitoren der Qualitat optischer Oberflachen wahrend des Polierens auf der Maschine und Ihre Anwendung zum Klassifizieren von Polierprozessen

Book Chapter (2002)
Author(s)

OW Faehnle (TU Delft - ImPhys/Optics)

T Wons (External organisation)

E Koch (External organisation)

S. Debruyne-Fisba (External organisation)

SM Booij (TU Delft - ImPhys/Optics)

M Meeder (External organisation)

H van Brug (TU Delft - ImPhys/Optics)

JJM Braat (TU Delft - ImPhys/Optics)

Research Group
ImPhys/Optics
More Info
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Publication Year
2002
Research Group
ImPhys/Optics
Pages (from-to)
103-113
ISBN (print)
3794906632

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