In situ Messmethode zum Monitoren der Qualitat optischer Oberflachen wahrend des Polierens auf der Maschine und Ihre Anwendung zum Klassifizieren von Polierprozessen
Book Chapter
(2002)
Author(s)
OW Faehnle (TU Delft - ImPhys/Optics)
T Wons (External organisation)
E Koch (External organisation)
S. Debruyne-Fisba (External organisation)
SM Booij (TU Delft - ImPhys/Optics)
M Meeder (External organisation)
H van Brug (TU Delft - ImPhys/Optics)
JJM Braat (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:65a0c998-8bdb-461f-b7e2-dfcf046a4b05
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Publication Year
2002
Research Group
ImPhys/Optics
Pages (from-to)
103-113
ISBN (print)
3794906632
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