In situ Messmethode zum Monitoren der Qualitat optischer Oberflachen wahrend des Polierens auf der Maschine und Ihre Anwendung zum Klassifizieren von Polierprozessen

Book chapter (2002)

Authors

OW Faehnle ImPhys/Optics - AS
T Wons External organisation
E Koch External organisation
S. Debruyne-Fisba External organisation
SM Booij ImPhys/Optics - AS
M Meeder External organisation
H van Brug ImPhys/Optics - AS
J.J.M. Braat ImPhys/Optics - AS
Research Group
ImPhys/Optics (AS) (TU Delft)
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Published Date

2002

Language

Undefined/Unknown

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics