Fabrication of a CMOS compatibile pressure sensor for harsh environments
Conference Paper
(2003)
Author(s)
L Pakula (TU Delft - Electronic Instrumentation)
H Yang (TU Delft - Electronic Instrumentation)
HTM Pham (TU Delft - Electronic Components, Technology and Materials)
Paddy J. French (TU Delft - Electronic Instrumentation)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:1c4d20ec-f7c8-44d7-b2a6-3f37afd9106d
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Publication Year
2003
Research Group
Electronic Instrumentation
Pages (from-to)
502-505
ISBN (print)
0-7803-7744-3
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