Fabrication of a CMOS compatibile pressure sensor for harsh environments

Conference Paper (2003)
Author(s)

L Pakula (TU Delft - Electronic Instrumentation)

H Yang (TU Delft - Electronic Instrumentation)

HTM Pham (TU Delft - Electronic Components, Technology and Materials)

Paddy J. French (TU Delft - Electronic Instrumentation)

Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Instrumentation
More Info
expand_more
Publication Year
2003
Research Group
Electronic Instrumentation
Pages (from-to)
502-505
ISBN (print)
0-7803-7744-3

No files available

Metadata only record. There are no files for this record.