The behaviour of deuterium incorporated into buried oxide of SIMOX

Journal Article (2001)
Author(s)

A Rivera (TU Delft - Old - Section Defects in Materials)

A van Veen (TU Delft - Old - Section Defects in Materials)

H. Schut (TU Delft - Old - Section Defects in Materials)

JMM de Nijs (External organisation)

P Balk (External organisation)

Paul Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))

Research Group
Old - Section Defects in Materials
More Info
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Publication Year
2001
Research Group
Old - Section Defects in Materials
Volume number
178
Pages (from-to)
287-290

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