Suspended graphene beams with tunable gap for squeeze-film pressure sensing

Conference paper (2017)

Authors

S. Vollebregt Electronic Components, Technology and Materials - EEMCS
R.J. Dolleman QN/Steeneken Lab - AS
H.S.J. van der Zant QN/van der Zant Lab - AS
P.G. Steeneken Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering , QN/Steeneken Lab - AS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Copyright: © 2017 S. Vollebregt, R.J. Dolleman, H.S.J. van der Zant, P.G. Steeneken, Pasqualina M Sarro
DOI: https://doi.org/10.1109/TRANSDUCERS.2017.7994162
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Published Date

2017

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

We present suspended graphene pressure sensors fabricated using an innovative surface micro-machining process. The great advantage of this process is that the molybdenum (Mo) catalyst layer for multi-layer graphene chemical vapor deposition (CVD) is also used as a sacrificial layer to suspend the graphene. This method allows for accurate control of the gap size under the beam by simply varying the catalyst thickness. Furthermore, the need for transfer of the graphene layer is eliminated. Using this method, wafer-scale graphene squeeze-film pressure sensors are fabricated and characterized.

Files

07994162.pdf
(.pdf | 2 Mb)
- Embargo expired in 27-01-2018