Suspended graphene beams with tunable gap for squeeze-film pressure sensing
S Vollebregt (TU Delft - Electronic Components, Technology and Materials)
Robin Dolleman (TU Delft - QN/Steeneken Lab)
Herre S J van der Zant (TU Delft - QN/van der Zant Lab)
Peter Steeneken (TU Delft - QN/Steeneken Lab, TU Delft - Dynamics of Micro and Nano Systems)
Lina Sarro (TU Delft - Electronic Components, Technology and Materials)
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Abstract
We present suspended graphene pressure sensors fabricated using an innovative surface micro-machining process. The great advantage of this process is that the molybdenum (Mo) catalyst layer for multi-layer graphene chemical vapor deposition (CVD) is also used as a sacrificial layer to suspend the graphene. This method allows for accurate control of the gap size under the beam by simply varying the catalyst thickness. Furthermore, the need for transfer of the graphene layer is eliminated. Using this method, wafer-scale graphene squeeze-film pressure sensors are fabricated and characterized.