Relaxation of internal stresses in chemically vapour deposited TiN/TiB2 double layers.
Conference Paper
(1998)
Author(s)
J te Nijenhuis (External organisation)
R Delhez (TU Delft - OLD Virtual Materials and Mechanics)
JGM Becht (External organisation)
Th.H de Keijser (External organisation)
EJ Mittemeijer (TU Delft - OLD Virtual Materials and Mechanics)
Research Group
OLD Virtual Materials and Mechanics
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https://resolver.tudelft.nl/uuid:22b41e3b-18b7-4fb8-adb8-890d5f5ae792
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Publication Year
1998
Research Group
OLD Virtual Materials and Mechanics
Pages (from-to)
577-584
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