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J te Nijenhuis

Conference paper (1)

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1

Relaxation of internal stresses in chemically vapour deposited TiN/TiB2 double layers.

Conference paper (1998) - J te Nijenhuis (author) , R Delhez (author) , JGM Becht (author) , Th.H de Keijser (author) , EJ Mittemeijer (author)