Temperature-governed lattice disorder, residual stress, and recovery in CVD 4H-SiC under Al implantation and annealing

Abstract

Ion implantation and subsequent annealing reshape the defect landscape and stress state of compound semiconductors, yet the temperature-dependent mechanisms in SiC remain incompletely understood. Here, we utilize molecular dynamics (MD) simulations and confocal micro-Raman measurements to resolve how implantation temperature and post-annealing regulate lattice disorder, amorphization kinetics, and residual-stress evolution in chemical vapor deposited (CVD) 4H-SiC. MD reveals surface-nucleated amorphization that propagates inward, whereas elevated implantation temperatures activate defect recombination pathways that suppress amorphous-layer formation. Raman signatures of optical-phonon shifts, linewidth broadening, and amorphization bands track the coupled evolution of lattice disorder and stress. Experimentally, increasing implantation temperature smooths the surface (S_a 0.133 → 0.101 nm) and reduces the amorphous-layer thickness (from ∼700 nm at 25°C to undetectable at 500°C), while driving more compressive residual stress (−57 → −132 MPa). Post-annealing largely restores phonon lifetimes and eliminates amorphization signatures, consistent with the recovery trends predicted by MD. These results delineate a thermal-treatment window that controls amorphization and residual stress in 4H-SiC, providing a transferable Raman-based methodology for nondestructive assessment of implantation-induced damage in compound semiconductors.