IC-compatible two-level bulk micromachining for RF silicon technology
Conference Paper
(2000)
Author(s)
PN Pham (TU Delft - Electronic Components, Technology and Materials)
Lina Sarro (TU Delft - Electronic Components, Technology and Materials)
TK Ng (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:234381fc-f498-4cc8-a74f-ea0fc224f2a9
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Publication Year
2000
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
204-207
ISBN (print)
2-86332-248-6
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