Power-efficient high-speed and high-resolution capacitive-sensor interface for subnanometer displacement measurements

Journal article (2012)

Authors

S. Xia Electronic Instrumentation - EEMCS
S. Nihtianova Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2012

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation