Power-efficient high-speed and high-resolution capacitive-sensor interface for subnanometer displacement measurements
Journal Article
(2012)
Author(s)
S. Xia (TU Delft - Electronic Instrumentation)
Stoyan Nihtianova (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/TIM.2011.2178678
To reference this document use:
https://resolver.tudelft.nl/uuid:248dee39-f297-4f47-ae9d-618bd18828bc
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Publication Year
2012
Language
English
Research Group
Electronic Instrumentation
Issue number
5
Volume number
61
Pages (from-to)
1315-1322
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