Optimization of mulitlayer reflectors for extreme ultraviolet lithography
Journal Article
(2004)
Author(s)
MF Bal (TU Delft - ImPhys/Optics)
M Singh (TU Delft - ImPhys/Optics)
JJM Braat (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:26390c76-afd8-4300-855d-d7d797728171
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Publication Year
2004
Research Group
ImPhys/Optics
Volume number
3
Pages (from-to)
1637-1646
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