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MF Bal
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Authored
8 records found
Optimizing multilayer coatings for extreme UV projection systems
Conference paper -
MF Bal
,
M Singh
,
J.J.M. Braat
Wavefront correction methods for extreme-ultraviolet multilayer reflectors
Journal article -
M Singh
,
MF Bal
,
J.J.M. Braat
,
D Joyeux
,
U Dinger
Influence of Multilayers on the optical Performance of Extreme Ultra Violet Projection Systems.
Conference paper -
MF Bal
,
F. Bociort
,
J.J.M. Braat
Next-Generation Extreme Ultraviolet Lithographic Projection Systems
Doctoral thesis -
MF Bal
Systematic analysis of unobscured mirror systems for microlithography.
Conference paper -
F. Bociort
,
MF Bal
,
J.J.M. Braat
Optimization of mulitlayer reflectors for extreme ultraviolet lithography
Journal article -
MF Bal
,
M Singh
,
J.J.M. Braat
Analysis search and classification for reflective ring-field projection systems
Journal article -
MF Bal
,
F. Bociort
,
J.J.M. Braat
The effect of obstructions on the design of reflective ring-field projection systems.
Conference paper -
MF Bal
,
F. Bociort
,
J.J.M. Braat