Wavefront correction methods for extreme-ultraviolet multilayer reflectors
Journal Article
(2003)
Author(s)
M. Singh (TU Delft - ImPhys/Optics)
MF Bal (TU Delft - ImPhys/Optics)
Joseph Braat (TU Delft - ImPhys/Optics)
D Joyeux (External organisation)
U Dinger (External organisation)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:701abf67-2824-4d8f-91e0-0c8b877bdce4
More Info
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Publication Year
2003
Research Group
ImPhys/Optics
Issue number
10
Volume number
42
Pages (from-to)
1847-1851
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