Wavefront correction methods for extreme-ultraviolet multilayer reflectors

Singh, M; Bal, MF; Braat, Joseph; Joyeux, D; Dinger, U

Wavefront correction methods for extreme-ultraviolet multilayer reflectors

Journal article (2003)

Authors

M Singh ImPhys/Optics

MF Bal ImPhys/Optics

Joseph Braat ImPhys/Optics

D Joyeux External organisation

U Dinger External organisation

Research Group

ImPhys/Optics

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Published Date

2003

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Research Group

ImPhys/Optics

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