Optimizing multilayer coatings for extreme UV projection systems
Conference Paper
(2002)
Author(s)
MF Bal (TU Delft - ImPhys/Optics)
M Singh (TU Delft - ImPhys/Optics)
JJM Braat (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:f406ca00-9708-4cd8-960c-af9abd704077
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Publication Year
2002
Research Group
ImPhys/Optics
Pages (from-to)
169-170
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