Laser annealing for ultra-shallow junction formation in advanced CMOS

R. Surdeanu (External organisation)

YV Ponomarev (External organisation)

R Cerutti (External organisation)

BJ Pawlak (External organisation)

Lis Nanver (TU Delft - Electronic Components, Technology and Materials)

I Hoflijk (External organisation)

PA Stolk (External organisation)

CJJ Dachs (External organisation)

MA Verheijen (External organisation)

M. Kaiser (External organisation)

MJP Hopstaken (External organisation)

JGM van Berkum (External organisation)

F Roozeboom (External organisation)

R Lindsay (External organisation)