MEMS test structure for measuring thermal conductivity of thin films
Conference Paper
(2006)
Author(s)
L La Spina (TU Delft - Electronic Components, Technology and Materials)
N Nenadovic (TU Delft - Electronic Components, Technology and Materials)
AW van Herwaarden (External organisation)
H. Schellevis (TU Delft - Electronic Components, Technology and Materials)
W.H.A. Wien (TU Delft - Electronic Components, Technology and Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:28d22619-3924-4c94-b3cc-62da71fdb414
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Publication Year
2006
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
137-142
ISBN (print)
1-4244-0167-4
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