Ultrashallow junction silicon photodiodes for detection of low energy electrons

Sakic, A.; Nanver, L.K.; Scholtes, T.L.M.; Heerkens, C.T.H.; van Veen, G; Kooijman, K; Vogelsang, P.

Ultrashallow junction silicon photodiodes for detection of low energy electrons

Conference paper (2010)

Authors

A. Sakic Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

T.L.M. Scholtes Electronic Components, Technology and Materials -

C.T.H. Heerkens ImPhys/Charged Particle Optics

G van Veen External organisation

K Kooijman External organisation

P. Vogelsang External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

To reference this document use:

http://resolver.tudelft.nl/uuid:2921f4b7-bce4-46e2-99e5-932018603d1b

More Info

expand_more

Published Date

2010

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials