Ultrashallow junction silicon photodiodes for detection of low energy electrons

Conference paper (2010)

Authors

A. Sakic Electronic Components, Technology and Materials - EEMCS
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
T.L.M. Scholtes Electronic Components, Technology and Materials - EEMCS
C.T.H. Heerkens ImPhys/Charged Particle Optics
G van Veen External organisation
K Kooijman External organisation
P. Vogelsang External organisation
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2010

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials