Ultrashallow junction silicon photodiodes for detection of low energy electrons
Conference Paper
(2010)
Author(s)
A Sakic (TU Delft - Electronic Components, Technology and Materials)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
TLM Scholtes (TU Delft - Electronic Components, Technology and Materials)
C. Th H. Heerkens (TU Delft - ImPhys/Charged Particle Optics)
G van Veen (External organisation)
K Kooijman (External organisation)
P. Vogelsang (External organisation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:2921f4b7-bce4-46e2-99e5-932018603d1b
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
150-153
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