Advanced excimer-laser crystallization process for single-crystalline thin film transistor
Journal Article
(2003)
Author(s)
R. Ishihara (TU Delft - Electronic Components, Technology and Materials)
PC van der Wilt (TU Delft - Electronic Components, Technology and Materials)
BD van Dijk (TU Delft - Electronic Components, Technology and Materials)
A Burtsev (External organisation)
JW Metselaar (TU Delft - Electronic Components, Technology and Materials)
Kees Beenakker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:2cc5cd96-873c-4407-b82d-42f8ae0ae7e3
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Publication Year
2003
Research Group
Electronic Components, Technology and Materials
Volume number
427
Pages (from-to)
77-85
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