Closed loop thermal control of a lithographic optical component
Conference Paper
(2013)
Author(s)
R. Saathof (TU Delft - Mechatronic Systems Design)
J.W. Spronck (TU Delft - Mechatronic Systems Design)
R.H. Munnig Schmidt (TU Delft - Mechatronic Systems Design)
A Haber (TU Delft - Team Michel Verhaegen)
M.H.G. Verhaegen (TU Delft - Team Michel Verhaegen)
Research Group
Mechatronic Systems Design
To reference this document use:
https://resolver.tudelft.nl/uuid:2db7bfd0-98d9-4dec-917c-820873694df8
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Publication Year
2013
Language
English
Research Group
Mechatronic Systems Design
Pages (from-to)
138-143
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