Packaging influences on the reliability of MEMS resonators
Journal Article
(2008)
Author(s)
JJM Zaal (TU Delft - Computational Design and Mechanics)
W. D. van Driel (TU Delft - Dynamics of Micro and Nano Systems)
S Bendida (External organisation)
Q Li (TU Delft - Computational Design and Mechanics)
JTM van Beek (External organisation)
Guogi Zhang (TU Delft - Computational Design and Mechanics)
Research Group
Computational Design and Mechanics
DOI related publication
https://doi.org/doi:10.1016/j.microrel.2008.06.041
To reference this document use:
https://resolver.tudelft.nl/uuid:2ea557f7-e620-4ab4-a74f-c50bcc90f7f1
More Info
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Publication Year
2008
Research Group
Computational Design and Mechanics
Volume number
48
Pages (from-to)
1567-1571
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