SiGe HBTs implemented with implanted laser-annealed emitters to completely eliminate the transient enhanced diffusion
Conference Paper
(2008)
Authors
G Lorito (Old - EWI Sect. ECTM)
V Gonda (Old - EWI Sect. ECTM)
T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
To reference this document use:
https://resolver.tudelft.nl/2f83cbc2-2d57-4da1-8699-701386ffe3df
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Publication Year
2008
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
291-294
ISBN (print)
978-1-4244-1881-7
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