SiGe HBTs implemented with implanted laser-annealed emitters to completely eliminate the transient enhanced diffusion

Conference paper (2008)

Authors

G. Lorito Old - EWI Sect. ECTM
V Gonda Old - EWI Sect. ECTM
T.L.M. Scholtes Electronic Components, Technology and Materials - EEMCS
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Old - EWI Sect. ECTM
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Published Date

2008

Language

Undefined/Unknown

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Research Group

Old - EWI Sect. ECTM