SiGe HBTs implemented with implanted laser-annealed emitters to completely eliminate the transient enhanced diffusion
Conference Paper
(2008)
Author(s)
G Lorito (TU Delft - Old - EWI Sect. ECTM)
V Gonda (TU Delft - Old - EWI Sect. ECTM)
T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)
Lis Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
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https://resolver.tudelft.nl/uuid:2f83cbc2-2d57-4da1-8699-701386ffe3df
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Publication Year
2008
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
291-294
ISBN (print)
978-1-4244-1881-7
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