SiGe HBTs implemented with implanted laser-annealed emitters to completely eliminate the transient enhanced diffusion

Lorito, G.; Gonda, V; Scholtes, T.L.M.; Nanver, L. K.

SiGe HBTs implemented with implanted laser-annealed emitters to completely eliminate the transient enhanced diffusion

Conference paper (2008)

Authors

G. Lorito Old - EWI Sect. ECTM

V Gonda Old - EWI Sect. ECTM

T.L.M. Scholtes Electronic Components, Technology and Materials

L. K. Nanver Electronic Components, Technology and Materials

Research Group

Old - EWI Sect. ECTM

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Published Date

2008

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Research Group

Old - EWI Sect. ECTM

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