The surface transient in Si for SIMS with oblique low-energy o2+ beams.
Journal Article
(1999)
Author(s)
ZX Jiang (External organisation)
PFA Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))
Research Group
Old - sect Electronic Materials (NS/EM)
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https://resolver.tudelft.nl/uuid:2fbe978f-8b47-4746-9a47-38cb830895cc
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Publication Year
1999
Research Group
Old - sect Electronic Materials (NS/EM)
Volume number
27
Pages (from-to)
125-131
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