Versatile wire configuration for independent actuation of bending and torsion displacements of microcantilevers

Conference Paper (2006)
Author(s)

Warner J. Venstra (TU Delft - Mechatronic Systems Design)

M van der Velden (TU Delft - Mechatronic Systems Design)

J. W. Spronck (TU Delft - Mechatronic Systems Design)

J. van Eijk (TU Delft - Mechatronic Systems Design)

Research Group
Mechatronic Systems Design
More Info
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Publication Year
2006
Research Group
Mechatronic Systems Design
Pages (from-to)
583-587

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