VUV/low-energy electron Si photodiodes with postmetal 400°C PureB deposition

V Mohammadi (TU Delft - Electronic Components, Technology and Materials)

L. Qi (TU Delft - Electronic Components, Technology and Materials)

N Golshani (TU Delft - Electronic Components, Technology and Materials)

C. Mok Kai Rine (TU Delft - Electronic Components, Technology and Materials)

W.B. de Boer (TU Delft - Old - EWI Sect. ECTM)

Amir Sammak (TU Delft - Electronic Components, Technology and Materials)

J. Derakhshandeh Kheljani (TU Delft - Electronic Components, Technology and Materials)

J. van der Cingel (TU Delft - Electronic Components, Technology and Materials)

L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)