Coating of deep anisotropically etched grooves with polymide and photoresist
Conference Paper
(2000)
Author(s)
VG Kiutchoukov (External organisation)
J.R. Mollinger (TU Delft - Electronic Instrumentation)
A. Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:348cc7ad-2372-44db-83d8-f953f35a66e5
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Publication Year
2000
Research Group
Electronic Instrumentation
Pages (from-to)
655-658
ISBN (print)
90-73461-24-3
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