Design of a magnetically levitated nm-resolution linear slider

Conference paper (2006)

Authors

DAH Laro Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

T Porck External organisation

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

AV Lebedev External organisation

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

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To reference this document use:

http://resolver.tudelft.nl/uuid:34f2c6c8-5d9f-4429-80fe-bf7d5d8191cd

Published Date

2006

Language

Undefined/Unknown

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design