Virtual Design and Qualification of IC Backend Structures
Conference Paper
(2006)
Author(s)
RBR van Silfhout (External organisation)
O van der Sluis (External organisation)
W. D. van Driel (TU Delft - Dynamics of Micro and Nano Systems)
JHJ Janssen (External organisation)
Guo-Qi Zhang (TU Delft - Computational Design and Mechanics)
Research Group
Dynamics of Micro and Nano Systems
To reference this document use:
https://resolver.tudelft.nl/uuid:3509731e-263c-4f76-b53a-d90f3763a15c
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Publication Year
2006
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
1-5
ISBN (print)
1-4244-0272X
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