A chip-scale RF MEMS gyrator via hybridizing Lorentz-force and piezoelectric transductions

Conference paper (2019)

Authors

Tao Wu ShanghaiTech University
Ruochen Lu University of Illinois at Urbana Champaign
Anming Gao University of Illinois at Urbana Champaign
Cheng Tu Northeastern University
T. Manzaneque Garcia Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Songbin Gong University of Illinois at Urbana Champaign
Research Group
Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)
More Info
expand_more

Published Date

2019

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems

Abstract

This paper presents the design and experimental results of the first chip-scale radio frequency MEMS gyrator based on hybridizing Lorentz-force and piezoelectric transduction. The MEMS gyrator has a non-reciprocal phase response of 180° and can be used as the building blocks for synthesizing complex non-reciprocal networks. The equivalent circuit and measured performance of a fabricated MEMS gyrator are presented, both showing the anticipated 180° phase difference. The demonstration marks the first time that non-reciprocity is attained at radio frequencies with an entirely passive chip-scale mechanical device. Various challenges in achieving strong coupling and low insertion loss for the designed devices will be discussed.