Hermeticity and thermal stability testing of PECVD silicon nitride thin-film packages

Q Li (TU Delft - Computational Design and Mechanics)

Johannes Goosen (TU Delft - Computational Design and Mechanics)

JTM van Beek (External organisation)

Fred van Van Keulen (TU Delft - Computational Design and Mechanics)

KL Phan (External organisation)

B. van Velzen (External organisation)

JJM Bontemps (External organisation)

JJ Koning (External organisation)

Guo Qi Z Zhang (TU Delft - Dynamics of Micro and Nano Systems)