KL Phan | TU Delft Repository

Library

local_library Home Repository

KP

KL Phan

Conference paper (1)

Journal article (1)

2 records found

1

Failure analysis of a thin-film nitride MEMS package

Journal article (2008) - Q Li (author) , Johannes Goosen (author) , JTM van Beek (author) , Fred van Van Keulen (author) , KL Phan (author) , Guo Qi Z Zhang (author)

Hermeticity and thermal stability testing of PECVD silicon nitride thin-film packages

Conference paper (2008) - Q Li (author) , Johannes Goosen (author) , JTM van Beek (author) , Fred van Van Keulen (author) , KL Phan (author) , B. van Velzen (author) , JJM Bontemps (author) , JJ Koning (author) , Guo Qi Z Zhang (author)