Parallel, miniaturized scanning probe microscope for defect inspection and review

Conference paper (2014)

Authors

H. Sadeghian Marnani Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
TC van den Dool External organisation
WE Crowcombe External organisation
RW Herfst External organisation
J Winters External organisation
GFIJ Kramer External organisation
NB Koster External organisation
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2014

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics