Parallel, miniaturized scanning probe microscope for defect inspection and review

Sadeghian Marnani, Hamed; van den Dool, TC; Crowcombe, WE; Herfst, RW; Winters, J; Kramer, GFIJ; Koster, NB

Parallel, miniaturized scanning probe microscope for defect inspection and review

Conference paper (2014)

Authors

Hamed Sadeghian Marnani Computational Design and Mechanics

TC van den Dool External organisation

WE Crowcombe External organisation

RW Herfst External organisation

J Winters External organisation

GFIJ Kramer External organisation

NB Koster External organisation

Research Group

Computational Design and Mechanics

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Published Date

2014

Language

English

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Research Group

Computational Design and Mechanics

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