Helium Ion Beam Processing for Nanofabrication and Beam-Induced Chemistry
Journal Article
(2010)
Author(s)
PFA Alkemade (TU Delft - QN/Kavli Nanolab Delft)
VA Sidorkin (TU Delft - QN/Kavli Nanolab Delft)
P Chen (TU Delft - QN/Kavli Nanolab Delft)
E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)
AK Van Langen-Suurling (TU Delft - QN/Kavli Nanolab Delft)
D Maas (External organisation)
E van Veldhoven (External organisation)
Research Group
QN/Kavli Nanolab Delft
To reference this document use:
https://resolver.tudelft.nl/uuid:38e69ae3-9354-4cb9-96a7-d8cec31b7c7b
More Info
expand_more
expand_more
Publication Year
2010
Research Group
QN/Kavli Nanolab Delft
Issue number
7
Volume number
24
Pages (from-to)
?-?
No files available
Metadata only record. There are no files for this record.