Helium Ion Beam Processing for Nanofabrication and Beam-Induced Chemistry

Alkemade, P.F.A.; Sidorkin, VA; Chen, P; van der Drift, EWJM; Van Langen-Suurling, Anja; Maas, D; Veldhoven, E van

Helium Ion Beam Processing for Nanofabrication and Beam-Induced Chemistry

Journal article (2010)

Authors

P.F.A. Alkemade QN/Kavli Nanolab Delft

VA Sidorkin QN/Kavli Nanolab Delft

P Chen QN/Kavli Nanolab Delft

EWJM van der Drift QN/Kavli Nanolab Delft

Anja Van Langen-Suurling QN/Kavli Nanolab Delft

D Maas External organisation

E van Veldhoven External organisation

Research Group

QN/Kavli Nanolab Delft

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Published Date

2010

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Research Group

QN/Kavli Nanolab Delft

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