Secondary ion mass spectrometry and atomic force spectroscopy studies of surface roughening, erosion rate change and depth resolurion in Si during 1 keV 60 degrees O2+ bombardment with oxygen flooding

Journal article (1998)

Authors

ZX Jiang External organisation
P.F.A. Alkemade Old - sect Electronic Materials (NS/EM)
Research Group
Old - sect Electronic Materials (NS/EM)
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Published Date

1998

Language

Undefined/Unknown

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Research Group

Old - sect Electronic Materials (NS/EM)