Secondary ion mass spectrometry and atomic force spectroscopy studies of surface roughening, erosion rate change and depth resolurion in Si during 1 keV 60 degrees O2+ bombardment with oxygen flooding
Journal Article
(1998)
Author(s)
ZX Jiang (External organisation)
PFA Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))
Research Group
Old - sect Electronic Materials (NS/EM)
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Publication Year
1998
Research Group
Old - sect Electronic Materials (NS/EM)
Issue number
4
Volume number
16
Pages (from-to)
1971-1982
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