Bulk-Micromachined Test Structure for Fast and Reliable Determination of the Lateral Thermal Conductivity of Thin Films
Journal Article
(2007)
Author(s)
L la Spina (TU Delft - Electronic Components, Technology and Materials)
AW van Herwaarden (External organisation)
H Schellevis (TU Delft - Electronic Components, Technology and Materials)
W.H.A. Wien (TU Delft - Electronic Components, Technology and Materials)
N Nenadovi¿ (External organisation)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:39c7a539-f886-4208-a851-914ec53f513b
More Info
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Issue number
3
Volume number
6
Pages (from-to)
675-683
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