Development of an Atomic Force Microscope
Master Thesis
(2010)
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Copyright
© 2010 Obrebski, J.W.
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Publication Year
2010
Copyright
© 2010 Obrebski, J.W.
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Abstract
This abstract presents the development of an Atomic Force Microscope (AFM) vertical scanner for surface topography measurements, which is composed of a single axis positioning stage with an integrated metrology system and AFM probe. The scanner is meant to track and measure a maximum topography step of 10 ?m with a measurement resolution of less then 0.1 nm and an uncertainty of less than 10 nm (1←) at a controllable bandwidth of at least 2 kHz.