Phase control and stability of thin silicon films deposited from silane diluted with hydrogen

Conference paper (2007)

Authors

G van Elzakker Electronic Components, Technology and Materials - EEMCS
P Sutta External organisation
F.D. Tichelaar QN/High Resolution Electron Microscopy
M. Zeman Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Elektrotechniek Techniek
More Info
expand_more

Published Date

2007

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials