Phase control and stability of thin silicon films deposited from silane diluted with hydrogen
Conference Paper
(2007)
Author(s)
G van Elzakker (TU Delft - Electronic Components, Technology and Materials)
P Šutta (External organisation)
F.D. Tichelaar (QN/High Resolution Electron Microscopy)
M Zeman (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:3a34c313-96a8-4c7f-80c3-f789ad8b8619
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
179-184
ISBN (print)
978-1-55899-949-7
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