Particle filters integrated inside a silicon wafer
Journal Article
(2005)
Author(s)
WJ Venstra (TU Delft - Mechatronic Systems Design)
PN Pham (TU Delft - Electronic Components, Technology and Materials)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
J van Eijk (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
DOI related publication
https://doi.org/10.1016/j.mee.2004.12.019
To reference this document use:
https://resolver.tudelft.nl/uuid:3dd57314-db35-484f-bd91-7cb82f8eb989
More Info
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Publication Year
2005
Research Group
Mechatronic Systems Design
Volume number
78-79
Pages (from-to)
138-141
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