Development of a multi electron beam source for sub-10 nm electron beam induced deposition

Journal article (2005)

Authors

MJ van Bruggen ImPhys/Charged Particle Optics
B van Someren ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2005

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics