Development of a multi electron beam source for sub-10 nm electron beam induced deposition
Journal Article
(2005)
Author(s)
MJ van Bruggen (TU Delft - ImPhys/Charged Particle Optics)
B van Someren (TU Delft - ImPhys/Charged Particle Optics)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:3e913063-d2b5-420f-9dac-4d83ef46082d
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Publication Year
2005
Research Group
ImPhys/Charged Particle Optics
Issue number
6
Volume number
23
Pages (from-to)
2833-2839
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