Structure of thin polycrystalline silicon films on ceramic substrates
Journal Article
(2001)
Author(s)
AJMM Zutphen (TU Delft - Electronic Components, Technology and Materials)
Pavol Šutta (External organisation)
Frans Tichelaar (TU Delft - OLD Virtual Materials and Mechanics)
A von Keitz (ECN, Petten)
M Zeman (TU Delft - Electronic Components, Technology and Materials)
JW Metselaar (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/Journal of Crystal Growth
To reference this document use:
https://resolver.tudelft.nl/uuid:3fada33b-8b32-42d0-aac6-7a2db16f79e0
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Publication Year
2001
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
1
Volume number
223
Pages (from-to)
332-340
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