Structure of thin polycrystalline silicon films on ceramic substrates

Journal article (2001)

Authors

AJMM Zutphen Electronic Components, Technology and Materials - EEMCS
P Sutta External organisation
F.D. Tichelaar OLD Virtual Materials and Mechanics
A von Keitz ECN, Petten
M. Zeman Electronic Components, Technology and Materials - EEMCS
JW Metselaar Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2001

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials