A novel bulge-testing set-up for tensile testing of micromachined rectangular free-standing thin films.
Journal Article
(1999)
Author(s)
AJ Kalkman (TU Delft - QN/Fysics of NanoElectronics)
A.H. Verbruggen (TU Delft - QN/Fysics of NanoElectronics)
Guido Janssen (TU Delft - OLD Metals Processing, Microstructures and Properties)
FH Groen (TU Delft - ImPhys/Optics)
Research Group
QN/Fysics of NanoElectronics
To reference this document use:
https://resolver.tudelft.nl/uuid:401ab982-5e1b-4648-a552-f4a871a3883f
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Publication Year
1999
Research Group
QN/Fysics of NanoElectronics
Volume number
70
Pages (from-to)
4026-4031
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