High Pressure Filling of Sub-micron Aluminium Vias
Conference Paper
(1998)
Author(s)
JF Jongste (External organisation)
JP Lokker (TU Delft - QN/Fysics of NanoElectronics)
GCAM Janssen (TU Delft - OLD Metals Processing, Microstructures and Properties)
A.H. Verbruggen (TU Delft - QN/Fysics of NanoElectronics)
S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)
Research Group
QN/Fysics of NanoElectronics
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https://resolver.tudelft.nl/uuid:43ba7684-2cd0-4272-b6a5-d52ba627db8a
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Publication Year
1998
Research Group
QN/Fysics of NanoElectronics
Pages (from-to)
217-224
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