Towards a Multi-Pixel Terahertz Camera with Passive Sensitivity Integrated in 130nm SiGe BiCMOS

Abstract

This contribution presents a silicon-integrated focal plane array (FPA) THz camera that achieves passive-level sensitivity and a densely sampled field-of-view. The FPA chip is designed in a 130nm SiGe BiCMOS technology from IHP and consists of a previously presented chessboard array topology with integrated direct detectors. The detectors are realized using a differential pair of heterojunction bipolar transistors in a common-base configuration biased in deep saturation. A silicon, hyper-hemispherical lens is mounted on the chip as a primary focusing element. The maximum responsivity of the camera is simulated to be 680 V/W at 350GHz, and above half this value between 260GHz and 600GHz. Simulations show that the minimum NEP is on the order of $2{\text{pW}}/\sqrt {Hz} $, yielding an NETD of 1K for a 150ms integration time. For characterization and future imaging demonstrations, the camera is mounted in a quasi-optical setup, which refocuses the beams from the silicon lens onto an imaging plane. Measurements performed in this setup demonstrate that the camera achieves a responsivity on the order of 550/W, while also realizing a dense focal plane sampling.